工程陶瓷超精密磨削表面质量的研究

A Study on the Surface Quality of Ultraprecision Grinding of Engineering Ceramics

本文从几何和物理特性两方面研究了ZrO2 和Sialon陶瓷超精磨制削的表面质量。实验结果表明 ,金刚石砂轮磨粒尺寸和磨削深度对磨削表面的微观形貌如几何形态和表面纹理具有重要影响。超精密磨削的表面存在着残余应力 ,但其数值较小 ,残余应力从表面向材料内部迅速减小。砂轮磨粒尺寸和磨削深度是残余应力的主要影响因素。在ZrO2 和Sialon陶瓷超精密加工的表面上亦存在着相变 ,ZrO2 陶瓷的相变将引起表面残余压应力的增加 ,Sialon陶瓷的相变对表面残余应力的影响很小。采用TEM和XRD对超精密磨削表层结构的研究表明 ,在加工表层存在着很深的变质层 ,它由表面的非晶层和相邻的塑性变形层组成 。

This paper has carried out research on the ultraprecision machined of surface quality ZrO 2 and Sialon ceramic, in terms of the geometrical and physical characteristics. Experimental results show that the grain size of diamond grinding wheel and grinding depth have important influence on micro-topography such as geometrical shape and surface topography etc. There is still surface residual stresses in the ultraprecision machined surface, but of small value. The surface residual stress will decrease gradually. The grain size and grinding depth also have important influence on the residual of stress. There is still phase transformation in the ZrO 2 and Sialon engineering ceramic surface. The phase transformation of ZrO 2 ceramics leads to the increasing of surface residual compressive stress, but the same change of Sialon has little influence on surface residual stress. study on the ultraprecision grinding surface by TEM and XRD has showed that there is a degenerating layer in the machined surface, which is composed of noncrystal layer, and the adjacent transition layer, and gradually transiting to the basic crystal of ceramic material.