晶圆级微波测试工艺研究

Process Research of Microwave Test in Wafer Level

从微波信号特性和微波器件晶圆级测试工艺要求出发,介绍了微波探针台的主要结构设计,并以某器件测试工艺为例,分别进行测试系统搭建、程序编写、数据读取与分析等描述,同时对该设备的特殊需求及后续发展方向进行展望。

According to the characteristics of microwave signal and the wafer test process requirements of microwave devices,the main structure design of microwave probe is introduced.Taking a device test as an example,the test system construction,programming,data reading and analysis are described respectively.The special requirements and future development direction of the device are prospected in the meanwhile.