湿法刻蚀含氟废渣的稳定化工艺研究

Study on Stabilizing Treatment of Waste Residue Containing Wet Etching of Fluoride

论述了湿法刻蚀工艺产生的高含氟废渣的特点,通过实验得出固化稳定化方法处理此类废渣的优化条件,减少处置成本,提高处置效率。

This paper depicted the characteristics of high concentration of fluorine-containing waste residue from wet etching process. Through experiments, the optimal conditions for this solidifying and stabilizing waste residue were obtained,which can reduce the disposal cost and improve the disposal efficiency.