基于激光干涉的位移传感器自动化校准装置

Automatic Calibration Device for Displacement Sensor Based on Laser Interferometer

为提高位移传感器的校准准确度及效率,通过硬件系统组建及软件系统编制,研制了位移传感器自动校准装置。采用激光干涉仪作为长度基准,通过两级驱动的定位控制方式,可实现nm量级的高分辨力准确定位;综合考虑固有因素、环境因素及安装因素,进行了测量不确定度分析,分析结果表明其测量不确定度为U=(0.1+2L)μm;通过选用不同类型的位移传感器,依据校准规范进行了试验分析,验证了校准装置的合理性及有效性。

In order to improve calibration accuracy and efficiency,the automatic calibration device for displacement sensors was developed through the construction of hardware system and software system.By adopting laser interferometer as linear reference,through manner of positioning control with two step driving,accurate high-resolution position that is of nanometer precision level could be achieved.Through synthesizing factor of inherence,environment and installation,uncertainty analysis was conducted.The results show that uncertainty was U=(0.1+2L)μm.Rationality and validity of calibration device are verified by using displacement sensors of different types and conducting experimental analysis that is in accordance with calibration specification.