电涡流速度传感器小型化研究

Research on miniaturization of eddy current speed sensor

非接触测量在高速测量领域占有很大比重,当测量环境比较恶劣时,电涡流式传感器几乎是唯一选择。受测量原理的限制,电涡流式传感器的量程与其体积成正比,在一些安装空间比较受限的地方,传感器小型化研究十分必要。针对电涡流式速度传感器,对其敏感线圈进行建模仿真,设计了单探头双线圈结构,从探头尺寸角度减小传感器体积,同时差分检测手段减弱线圈固有温漂特性,传感器输出稳定性得到增强。

Non-contact measurement occupies a large proportion in the field of high-speed measurement.When measurement environment is harsh,eddy current sensor is almost the only choice.Due to the limitation of the measurement principle,the range of the eddy current sensor is proportional to its volume.The miniaturization research of sensors is more meaningful in some installation spaces where there are limitations.Aiming at the eddy current speed sensor,its sensitive coil is modeled and simulated,and a single probe with double coils structure is designed to reduce the volume of the sensor from the perspective of the probe size.At the same time,the inherent temperature drift characteristics of the coil is weakened by differential detection method and the sensor output stability is enhanced.