磁控溅射NiCrAlY/MoS_(2)复合薄膜结构与性能研究

Structure and Properties of NiCrAlY/MoS_(2) Composite Films Fabricated by Magnetron Sputtering

目的通过离子源复合磁控溅射技术,制备宽温域耐磨减摩性能良好的NiCrAlY/MoS_(2)复合薄膜。方法采用离子源复合磁控溅射技术制备了NiCrAlY/MoS_2复合薄膜,研究不同MoS_(2)掺杂量对薄膜结构、力学性能和不同温度氧化热处理后摩擦学性能的影响。采用能谱仪(EDS)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)对薄膜元素含量、组织结构和相结构进行分析。通过显微硬度计、洛氏硬度计、球-盘式摩擦磨损试验机、3D轮廓仪及高温氧化试验,对复合薄膜硬度、膜/基结合力、摩擦磨损性能和抗氧化性能进行分析。结果 NiCrAlY及Ni CrAlY/MoS_(2)复合薄膜以柱状晶结构生长,物相结构主要由Ni_(3)Al、Ni-Cr和MoS_(2)组成。随着MoS_(2)含量的增加,薄膜柱状晶尺寸增加,致密度下降,薄膜硬度从503HV逐渐降到336HV。复合膜具有良好的膜/基结合力,结合力达到HF1级水平。掺杂MoS_(2)可以明显提高复合薄膜的摩擦学性能,当MoS_(2)掺杂量达到48.1%~69.8%时,NiCrAlY/MoS_(2)复合薄膜在室温下具有良好的耐磨减摩性能,其摩擦因数降低至0.038~0.09,磨损率比NiCrAlY薄膜降低1个数量级以上,达到2.14×10^(–6) mm^(3)/(N·m)。对NiCrAlY和NiCrAlY-48.1%MoS_(2)复合薄膜进行400℃和500℃高温氧化试验,复合薄膜氧化形成NiO、Al_(2)O_(3)、MoO_(3)相,经过氧化后复合薄膜仍具有良好的耐磨性能,400℃氧化后复合薄膜磨损率降至1.41×10^(–6) mm^(3)/(N·m)。结论 MoS_(2)掺杂量对NiCrAlY/MoS_(2)复合薄膜结构和性能有重要影响,当MoS_(2)原子数分数为48.1%时,复合薄膜在常温以及高温氧化后均具有良好的耐磨减摩性能。

The paper aims to prepare NiCrAlY/MoS2 composite films with good tribological properties in wide temperature range by ion source combined with magnetron sputtering method.The NiCrAlY/MoS2 composite films was prepared by ion source combined with magnetron sputtering method.The effects of MoS2 doping content on the film structure,mechanical properties,tribological properties and anti-oxidation properties of the composite films were studied.The element composition,microstructure and phase structure of the films were analyzed by EDS,SEM and XRD respectively.Micorhardness,adhesion strength,friction and wear performance and oxidation resistance of the composite films were analyzed by microhardness tester,Rockwell hardness tester,ball-on-disc friction and wear tester,3D profilometer and high temperature oxidation test.The results showed that NiCrAlY films and NiCrAlY/MoS2 composite films grew in columnar crystal structure and the phase structure was mainly composed of Ni3Al,Ni-Cr and MoS2.With the increasing of MoS2 content,the columnar crystal size increased and the density of the films decreased,and the microhardness of the films gradually decreased from 503HV to 336HV.The composite films had good adhesion strength,which reached to HF1 level.Doping MoS2 could significantly improve the tribological performance of the composite film.When the MoS2 content reached 48.1at.%~69.8at.%,the NiCrAlY/MoS2 composite films showed good tribological properties with the friction coefficient of 0.038~0.09,and the wear rate of 2.14×10^(–)6 mm^(3)/(N·m),which was more than one order of magnitude lower than that of the NiCrAlY films.The high temperature oxidation tests of NiCrAlY and NiCrAlY-48.1at.%MoS2 composite films were carried out at 400℃and 500℃.NiO,Al2O3 and MoO3 phases formed in the composite films after oxidation test.The composite films showed good tribological properties after oxidation test,and the wear rate of the composite films decreased to 1.41×10^(–6) mm^(3)/(N·m)after oxidation at 400℃for 2 h.The amount of MoS2 has an important impact on the structure and performance of the NiCrAlY/MoS2 composite films.The NiCrAlY/MoS2 composite films with MoS2 content of 48.1at.%possessed good tribological properties in air and after high temperature oxidation.