摘要
真空溅射镀膜机镀件的色差是衡量一件镀件质量好坏的重要的指标,也是评估一台设备质量的重要技术指标。影响镀件色差有多种因素,工作气体是其中一个重要因素。从真空溅射机的工作原理、工作气体对膜层的影响及试验研究入手,从气体压力和气体分布均匀性两个方面探讨了真空溅射机镀膜过程中工作气体对镀件色差的影响。为镀件色差分析、真空溅射镀膜机工作气体进气管的设计和镀件质量的提高提供了新的思路和参考。
The color difference of a vacuum sputtering machine is an important index to measure the quality of a piece of plating,and is also an important technical index to evaluate the quality of a piece of equipment.Starting from the principle of vacuum sputtering machine,the influence of working gas on the film layer and test,the influence of working gas on the color difference of the plating part in the process of vacuum sputtering machine coating was discussed in terms of gas pressure and gas distribution uniformity.A new idea and reference for color difference analysis of plating parts,design of working gas inlet pipe of vacuum sputtering coating machine and improvement of plating parts quality were provided.
作者
曾志锋
阮毅
谢泽兵
Zeng Zhifeng;Ruan Yi;Xie Zebing(Guangdong Machinery Research Institute Co.,Ltd.,Guangzhou 510635,China)
出处
《机电工程技术》
2021年第4期151-152,165,共3页
Mechanical & Electrical Engineering Technology
基金
国家重点研发计划资助(编号:2018YFB1404200)。
关键词
真空溅射镀膜机
工作气体
色差
vacuum sputtering coater
working gas
chromatic aberration
