微型石英晶体谐振器电极激光加工温度场仿真分析

Simulation Analysis of Temperature Field in Laser Machining of Micro Quartz Crystal Resonator Electrode

以石英晶体谐振器电极银层的激光刻蚀调频加工过程为研究对象,综合考虑了被加工材料的热物理参数和相应边界条件,利用ANSYS有限元软件仿真模拟了脉冲激光刻蚀加工过程中谐振器电极银层温度场分布情况,分析了不同激光加工工艺参数对材料温度的影响。分析结果表明,温度随与热源中心距离增加而减小,温度场呈近似椭圆形扩散,最高温度随激光加工功率、激光脉冲宽度的增大和加工速度的降低而增加。通过与实验结果的比较验证了仿真结果的正确性,为实际加工的工艺参数选取提供了理论参考。

The frequency modulation laser etching process of silver layer of quartz crystal resonator electrode is taken as the research object,considering the thermal physical parameters and corresponding boundary conditions of the material to be processed,the temperature field distribution of the silver layer of the resonator electrode in the process of pulse laser etching is simulated by using ANSYS finite element software,and the influence of different laser processing parameters on the material temperature is analyzed.The analysis results show that the temperature decreases with the increase of the distance from the heat source center,and the temperature field is approximately elliptic diffusion,the maximum temperature increases with the increase of laser processing power,laser pulse width and the decrease of processing speed.Compared with the experimental results,the correctness of the simulation results is verified,which provides a theoretical reference for the selection of actual processing parameters.