金属有机物化学气相沉积设备的智能化研究

Intelligent Research of Metal Organic Chemical Vapor Deposition Equipment

金属有机化合物化学气相沉积(MOCVD)设备深度嵌入信息技术,是高端芯片、新型传感器、工业控制计算机、智能仪器仪表与控制系统、工业软件、互联网技术、信息安全技术等的集成应用。通过对MOCVD装备的互联互通能力、自感知能力、自适应能力、自诊断能力、数据收集能力等五个方面的智能化水平进行研究,使其具备自感知、自诊断、自适应、自决策等功能。

Information technology is deeply embedded in metal organic chemical vapor deposition(MOCVD)equipment.The equipment is an integrated application of high-end chips,new sensors,industrial control computers,intelligent instrumentation and control systems,industrial software,Internet technology,and information security technology.Through the research on the intelligence level of MOCVD equipment in five aspects:interconnection ability,self-sensing ability,self-adaptive ability,selfdiagnosis ability and data collection ability,it has the functions of self-awareness,self-diagnosis,self-adaptation and self-decision.