质谱仪在空间行波管生产中的超灵敏度检漏应用

Ultrasensitive Leak Detection in the Production of Space Traveling Wave Tubes by Quadrupole Mass Spectrometer

保证极低的漏率是生产高可靠、长寿命空间行波管的必要条件。本文针对空间行波管微小漏孔常发生堵塞的问题,结合空间行波管的实际生产过程,在排气台上建立了一种超灵敏度检漏手段。通过漏率为1.8×10^(-8) Pa·m^(3)/s的标准漏孔和一支漏气的空间行波管对检漏性能和可靠性进行了测试与验证。结果表明,该系统的检漏下限为1.9×10^(-14) Pa·m^(3)/s,采用动态检漏法的检漏下限为8.3×10^(-12) Pa·m^(3)/s。上述超灵敏度检漏方法在生产过程中可有效地定位经烘烤后暴露出的漏孔,包括在大气环境下易堵塞的漏孔(10-10 Pa·m^(3)/s)、材料或焊缝缺陷导致的漏孔等,为完成高可靠空间行波管的封离提供有效保障。

It is low leak rate that is a necessary condition for the high reliability and longevity of space traveling wave tubes(Space TWTs).This paper develop an ultrasensitive leak detection method in the production of Space TWTs by quadrupole mass spectrometer to solve the problem of small leaks being blocked.The reliability of leak detection is tested and verified through a reference leak of 1.8×10^(-8) Pa·m^(3)/s and a leaking space traveling wave tube.The results show that the lower limit of leak detection under accumulation and under dynamic mode are 1.9×10^(-14) Pa·m^(3)/s and 8.3×10^(-12) Pa·m^(3)/s respectively.The ultrasensitive leak detection method in the production process can effectively detect the leaks exposed after baking,including leaks that are easy to be blocked in the atmosphere,leaks caused by defective material or weld,etc.