激光在材料去除加工中应用的研究进展

Research Progress of Laser Application in Material Removal

激光去除材料作为激光在工业生产中的重要应用,具有非接触、效率高、加工精度高等其他加工技术无法比拟的诸多优势。本文从单一激光束去除材料和激光复合减材技术两个方面进行阐述,介绍了激光打孔、激光切割、激光烧蚀、激光光刻这四项激光加工技术,并将其与其他加工技术进行了对比;此外,本文还介绍了以激光去除材料为主、多能量场为辅的激光复合技术,并针对单一激光束去除材料技术难以高效加工沟槽的问题,介绍了一种电磁场辅助的激光沟槽加工方法。

As an important laser application in industrial production,laser material removal has many advantages,such as no contact,high efficiency,and high processing accuracy.Herein,two aspects of the single-laser-beam removal material and laser hybrid reduction technology were elaborated.Further,four laser processing technologies of laser drilling,laser cutting,laser ablation,and laser lithography were introduced,and these technologies were compared with other processing technologies.The laser composite technology supplemented by the laser removal of materials and multiple energy fields is also introduced.Aiming at the problem of difficulty in efficiently processing grooves using single-laser-beam removal material technology,an electromagnetic-field-assisted laser groove processing method was introduced.