Nondestructive acquisition of the micro-mechanical properties of high-speed-dry milled micro-thin walled structures based on surface traits

Requirements for the service performance of aeronautic microelectronic components are increasingly strict.However,sever issues,that the acquisition of the service performance such as micro-mechanical properties is destructive,limit the subsequent application of the tested components.Addressing this issue,this paper proposes a nondestructive acquisition method of the micro-mechanical properties of the accelerometer micro-components,based on analyzing surface traits.To select qualified components without damage,we firstly developed a quasi-static microtensile tester and then established a combination prediction model of mechanical properties based on micro-milled surface traits.The model works due to the thin-walled structure,which makes the machined surface traits have significant influences on the mechanical properties such as Young’s modulus,yield strength,tensile strength,and elongation at break.Surface roughness,surface structure,and surface anisotropy are extracted to comprehensively present surface traits from different aspects.For improving the practicability of the model,the principal component analysis(PCA)is adopted to reduce high-dimensional traits explanatory variable space into two dimensions,and regression analysis models are comparative established in predicting the mechanical properties.Residuals analysis and error analysis are carried out to show the prediction accuracy.The maximum prediction error is about 10.62%,but the significance levels in the t-test of the predicted Young’s modulus and yield strength are not ideal.Therefore,kernel support vector regression(SVR)is imported to improve the prediction ability of the combination prediction model.The residuals analysis result shows that SVR is effective in enhancing the prediction ability of this model.