面向有源相控阵系统2~18 GHz超宽带幅相多功能MMIC

A 2~18 GHz Ultra⁃wideband Amplitude⁃phase Multifunctional MMIC for Active Phased⁃array System

基于0.15μm GaAs E/D pHEMT工艺研制了一款工作频率为2~18 GHz的高精度低功耗超宽带幅相多功能芯片,片内集成了超宽带数控移相器、Gm-boost结构行波放大器、单刀双掷吸收式开关、无源匹配电路、数字SPI接口电路等,整个芯片尺寸为4.0 mm×4.0 mm。提出奇偶模相速补偿的全通网络结构以及基于有源宽带差分结构的移相器电路拓扑,在九个倍频程范围内实现了高移相精度、低损耗和高幅度平坦度的数控移相器。测试结果表明:在2~18 GHz频率范围内移相精度RMS小于5°,移相寄生调幅小于±0.8 dB,发射/接收增益大于8 dB,输出1 dB压缩点功率大于12 dBm,输入驻波小于2.4,输出驻波小于1.7。

Based on 0.15μm GaAs E/D pHEMT technology,a high-precision and low-power ul⁃tra-wideband amplitude-phase multifunctional chip with working frequency of 2 to 18 GHz was de⁃veloped.The chip integrates an ultra-wideband digitally controlled phase shifter,a Gm-boost structure travelling wave amplifier,and single pole double throw switch,passive matching circuit,digital SPI interface,etc.The chip size is 4.0 mm×4.0 mm.In this paper,an all-pass network structure with even-odd mode phase velocity compensation and a phase shifter circuit topology based on an active broadband differential amplifier were proposed,and a digitally controlled phase shifter with high phase shift accuracy,low loss and high amplitude balance was realized in nine octaves.The measurement re⁃sults show that the root mean square(RMS)of phase errors less than 5°,the amplitude errors within±0.8 dB,the gains of receive and transmit over than 8 dB,the P1dB is more than 12 dBm,the VSWR of input is less than 2.4 and the VSWR of output is less than 1.7 over the 2 to 18 GHz.