Angel型龙虾眼X射线光学器件的研制及性能测试

Fabrication and Performance Testing of Angel Lobster-Eye X-Ray Micro-Pore Optics

Angel型龙虾眼X射线光学器件是一种新型X射线聚焦成像器件,具有独特的4π立体角聚焦能力和最佳有效面积-重量比,是未来最具有运用前景的X射线成像光学系统之一。依据龙虾眼的结构特性,采用微通道板方孔阵列制作技术成功研制了龙虾眼光学器件。采用Zygo干涉仪、条纹反射面型仪以及X射线束流检测设备对龙虾眼光学器件球面成型精度和聚焦成像特性进行了测试。测试结果表明:微孔光学器件的球面面型精度均方根为0.72μm,峰谷值为2.27μm,曲率半径约为752.3 mm。在电压为2 kV,电流为50μA条件下,横轴和纵轴的焦斑半峰全宽的直径约为0.39 mm和0.42 mm,对应的成像角分辨率分别为3.65 arcmin和3.93 arcmin。

Angel lobster-eye X-ray micro-pore optics(MPO) device, as a novel X-ray focusing device, has unique 4π stereoangle focusing ability and the optimal ratio of effective area to weight, thus being one of the most promising X-ray optical imaging systems. According to the structure characteristics of a lobster eye, a lobster eye optical device was successfully fabricated based on the fabrication technique of micro-channel plate square hole array in this paper. Then, the spherical surface accuracy and focusing characteristics of the device were tested by a Zygo interferometer, a fringe reflection profiler, and X-ray beam equipment. The test results show that the fabricated MPO device has a root-mean-square spherical surface accuracy of 0.72 μm, a peak-to-valley value of 2.27 μm, and a radius of curvature of about 752.3 mm. In addition, at a voltage of 2 kV and a current of 50 μA, the diameters of the full width at half maximum of the focal spots on the horizontal and vertical axes are approximately 0.39 mm and 0.42 mm, and the corresponding angular resolution is 3.65 arcmin and 3.93 arcmin, respectively.