耦合式MEMS微波功率传感器集总参数模型的优化

Optimization of Lumped Parameter Model for Coupled MEMS Microwave Power Sensors

耦合式MEMS微波功率传感器的集总参数模型可用于分析并计算器件的微波特性,是设计传感器相关结构尺寸的重要参考依据。针对目前传感器日益复杂化的阻抗匹配结构,对现有的集总参数模型进行了优化,并进行了相关理论推导。实验结果表明,优化后的模型计算出的反射系数最大误差为6.0 dB,插入损耗最大误差为0.7 dB,模型准确度相较于优化前有了明显的提升。因此,优化的集总参数模型对耦合式MEMS微波功率传感器的设计与优化具有一定的应用价值与参考意义。

The microwave characteristics of coupled MEMS microwave power sensor could be analyzed and calculated by the lumped parameter model, which had become an important reference for the design of sensor’s structure and size. For the increasingly complex impedance matching structure of sensors, the lumped parameter model of the sensor was optimized and derived in this work. The measurement results showed that the maximum calculated error of reflection coefficient was 6.0 dB, and the insertion loss was 0.7 dB. The accuracy of the model was obviously improved after the optimization. Therefore, the lumped parameter model optimized in this work had certain application value and reference significance for the design and optimization of coupled MEMS microwave power sensors.