基于HFCVD法的金刚石涂层铰刀制备

Preparation of Diamond Coated Reamer Based on HFCVD Method

钻孔后进行铰孔的精加工可以获得光滑的孔表面并消除毛刺,因此,使用金刚石涂层铰刀进行铰孔可以提高工件加工质量。采用双层热丝化学气相沉积(HFCVD)法在硬质合金铰刀上沉积金刚石薄膜,通过扫描电子显微镜和拉曼光谱对制备的薄膜进行表征。结果表明:采用双层热丝结构用化学气相沉积法制备的金刚石涂层铰刀刀尖部分的金刚石颗粒在1.5μm左右,并且金刚石薄膜覆盖整个铰刀刀刃部位;刀尖部位金刚石薄膜有微量脱落。使用钨铼热电偶对基体温度进行测量,距刀顶0~18mm的基体温度分布在755℃~965℃范围内,有利于金刚石涂层的生长。在拉曼光谱中,金刚石薄膜的峰位于1335cm^(-1)处,此外在1529.04cm^(-1)处有弱峰,表明薄膜内有少量的非金刚石相。金刚石薄膜内存在压应力,计算所得残余应力值为^(-1).701GPa。

It is necessary to carry out the finishing operation of reaming to make the hole surface smooth and eliminate the burr after hole drilling.The machining quality of workpieces can be improved by reaming with diamond coated reamers.Diamond films are deposited on cemented tungsten carbide reamers by double-layer hot filament chemical vapor deposition(HFCVD).The films are characterized by scanning electron microscope and Raman spectroscopy.The results show that the diamond crystal grains at the tip of the diamond-coated reamer prepared by HFCVD with double-layer hot filament structure are about 1.5μm, the diamond coating can cover the whole reamer edges, and a little delamination of diamond films at the tip can be observed.The substrate temperature is measured by tungsten-rhenium thermocouple, and the result shows that the reamer temperature at the place 0~18 mm away from the top of the tool ranges from 755℃ to 965℃,which is beneficial to the growth of diamond coating.The Raman peak of diamond film is located at 1335 cm^(-1),and there is a weak peak at 1529.04 cm^(-1),indicating that there is a small amount of non-diamond phase in the film.There is a compressive stress in the diamond film with the calculated value of^(-1).701 GPa.