Improved 4H-SiC UMOSFET with super-junction shield region

This article investigates an improved 4H-SiC trench gate metal–oxide–semiconductor field-effect transistor(MOSFET)(UMOSFET)fitted with a super-junction(SJ)shielded region.The modified structure is composed of two n-type conductive pillars,three p-type conductive pillars,an oxide trench under the gate,and a light n-type current spreading layer(NCSL)under the p-body.The n-type conductive pillars and the light n-type current spreading layer provide two paths to and promote the diffusion of a transverse current in the epitaxial layer,thus improving the specific on-resistance(R_(on,sp)).There are three p-type pillars in the modified structure,with the p-type pillars on both sides playing the same role.The p-type conductive pillars relieve the electric field(E-field)in the corner of the trench bottom.Two-dimensional simulation(silvaco TCAD)indicates that Ron,sp of the modified structure,and breakdown voltage(V_(BR))are improved by 22.2%and 21.1%respectively,while the maximum figure of merit(FOM=V_(BR)^(2)/R_(on,sp)) is improved by 79.0%.Furthermore,the improved structure achieves a light smaller low gate-to-drain charge(Q_(gd))and when compared with the conventional UMOSFET(conventional-UMOS),it displays great advantages for reducing the switching energy loss.These advantages are due to the fact that the p-type conductive pillars and n-type conductive pillars configured under the gate provide a substantial charge balance,which also enables the charge carriers to be extracted quickly.In the end,under the condition of the same total charge quantity,the simulation comparison of gate charge and OFF-state characteristics between Gaussdoped structure and uniform-doped structure shows that Gauss-doped structure increases the V_(BR)of the device without degradation of dynamic performance.