硅基PN结型光波导有效折射率的定量分析

Effective Refractive Index Quantitative Analysis of Silicon-Based PN Junction Optical Waveguide

为解决脊型波导相位调制的有效折射率测量问题,提出一种3端口MZI(Mach-Zehnder Interferometer)结构,能定量测量并分析PN结(Positive-Negative junction)脊型硅光波导中,有效折射率的实部和虚部受偏置电压调制的相对变化,并给出多项式拟合方程。实验所得结果与拟合结果非常符合,最终可以得到脊型波导在相位调制过程中的特性。该测量方法简单易行,可应用于硅基光电子集成芯片当中,作为载流子调制特性定量检测器件。

In order to solve the effective refractive index measurement problem of the ridged waveguide phase modulation,a three-port MZI( Mach-Zehnder Interferometer) structure is proposed. It can quantitatively measure and analyze the relative changes of the real and imaginary parts of the effective refractive index with the voltage varies of the PN ridged silicon optical waveguide and the polynomial fitting equation is derived. The experimental results are in good agreement with the fitting results,and then finally the characteristics of the ridged waveguide in the phase modulation process are obtained. This measurement method is simple and feasible,and can be used in silicon based optoelectronic integrated chips as a quantitative device for the detection of carrier modulation characteristics.