ReSe_(2)薄膜的盐助生长及其光电特性研究

Salt Assisted Growth and Photoelectric Properties of ReSe Thin Films

二硒化铼(ReSe_(2))因具有较好的红外光响应和各向异性特性而成为近年来的研究热点。采用盐辅助化学气相沉积技术,在SiO_(2)/Si衬底上成功合成了大面积的单层ReSe_(2)薄膜,其尺寸达到80μm。采用拉曼光谱(Raman)、光致发光光谱(PL)、原子力显微镜(AFM)和X射线光电子能谱(XPS)等手段对制备的ReSe_(2)薄膜样品进行了形貌、光谱、厚度和元素成分的表征,结果表明所制备的ReSe_(2)薄膜晶体质量高。基于单层ReSe_(2)薄膜构筑了场效应晶体管,系统研究了其光电特性,结果显示器件的响应时间达毫秒级。

Recently,rhenium disselenide(ReSe_(2))has become a research hotspot due to its good infrared light response and anisotropic properties.Through the salt-assisted chemical vapor deposition technology,large-area monolayer ReSe_(2) films with a size of 80 microns were successfully synthesized on SiO_(2)/Si substrates.The morphology,spectrum,thickness and element composition of ReSe_(2) films samples were analyzed by means of Raman spectroscopy(Raman),photoluminescence spectroscopy(PL),atomic force microscopy(AFM)and X-ray photoelectron spectroscopy(XPS),revealing that the as-prepared ReSe_(2) films have high crystal quality.Field-effect transistor photodetectors were fabricated based on the monolayer ReSe_(2) films and their photoelectric properties were systematically investigated,and the response time of millisecond level is achieved.