水性丙烯酸醇酸树脂紫外光刻胶的制备与性能研究

Preparation and performance study of waterborne acrylic alkyd resin UV photoresist

用大豆油、三羟甲基丙烷、顺丁烯二酸酐和偏苯三酸酐为主要原料制备水性醇酸树脂,再加入乙氧基化三羟甲基丙烷三丙烯酸酯、季戊四醇三丙烯酸酯、二苯甲酮和安息香乙醚,合成紫外光固化水性光刻胶。用红外光谱表征了产物结构;用粒度分布仪测得不同pH下产品的粒径大小;用粘度仪测定产品在不同pH下的粘度。此水性丙烯酸醇酸树脂对石英玻璃或铝箔的附着力较好,可望用作制造集成电路芯片的光刻胶。

Waterborne alkyd resin was prepared from soybean oil,trimethylol propane,maleic anhydride and benzoic acid anhydride as the main raw materials,followed by the addition of ethoxy trimethylol propane triacrylate,pentamyl tetraol triacrylate,diphenylmethyl ketone and benzoin ethyl ether to synthesize UV-curable waterborne photoresist.The structure of the product was characterized by infrared spectroscopy.The particle size of the product under different pH was measured by particle size distribution instrument.Viscosity meter was used to measure the viscosity of the product at different pH.The water-based alkyd acrylate resin has good adhesion to quartz glass or aluminum foil,so it can be used as photoresist for IC chip manufacturing.