真空热处理炉炉况对钽粉碳含量影响因素分析

Analysis of Influence Factors on Carbon Content of Tantalum Powder in Vacuum Heat Treatment Furnace

分析了真空热处理炉炉况管理对钽粉碳含量的影响因素,重点分析了不同热处理温度、真空阀加装限位、油扩散泵冷凝壁冷却水连接方式,油扩散泵关闭维持泵后不同管道真空、扩散泵障板冷却方式、油扩散泵壁不同回水温度对钽粉碳含量的影响。研究表明较高的烧结温度能够有效地降低钽粉中的碳含量,可提高真空炉空载烘炉温度;真空炉真空阀未加装限位器较加装限位器生产钽粉碳含量明显偏高,真空炉的真空阀需加装限位器有效实现阀门的连锁开启关闭;油扩散泵冷凝壁冷却水连接方式采用下进上出的方式生产钽粉的碳含量明显偏高,油扩散泵冷凝壁冷却水应采用上进下出的方式;扩散泵前级管道在关闭维持泵6h后的管道压力越大碳含量越高,应保证扩散泵的管道在一定压力范围内;油扩散泵障板处采用氟利昂制冷的碳含量较采用水冷的碳含量明显偏低;扩散泵泵壁出口温度偏高,可在扩散泵泵壁出口端增加增加泵,有效碳解决了出口温度偏高、真空炉生产钽粉的碳含量偏高的问题。

The influencing factors of the vacuum heat treatment furnace condition management on the carbon content of tantalum powder were analysed.It focuses on analysis of different heat treatment temperatures, vacuum valve installation limits, and oil diffusion pump condensate wall cooling water connection methods, different pipeline vacuum on after the oil diffusion pumpth, Diffusion pump barrier cooling mode, oil diffusion pump wall different backwater temperature which is influent to the carbon content of tantalum powder.The results show that a higher sintering temperature can effectively reduce the carbon content in tantalum powder and increase the temperature of the vacuum furnace without load.The carbon content of the tantalum powder produced by the vacuum furnace without a stopper is obviously higher than that with a stopper.The vacuum valve of the vacuum furnace needs to be equipped with a stopper to effectively realize the interlocking opening and closing of the valve.The condensate wall cooling water connection method of the oil diffusion pump adopts the method of top-out and bottom-in.that the tantalum content in the production of tantalum powder is obviously higher.The higher the pipeline pressure of the diffusion pump foreline pipeline after the maintenance pump is closed for 6 hours, the higher the carbon content.It should ensure that the diffusion pump pipe in a certain range of pressure.The carbon content in the barrier plate of the oil diffusion pump cooled by freon is obviously lower than that cooled by water, and the outlet temperature of the diffusion pump wall is slightly lower than that of the pump wall, the pump can be added at the outlet end of the diffusion pump wall, effectively solve the problem of high exit temperature and high carbon content in Ta powder produced by vacuum furnace.