摘要
本文详细介绍了大型金属卷材表面改性连续卷绕镀膜生产线的工作原理、结构组成、技术特点和主要创新设计要点。分析并指出影响大卷径宽幅金属卷材镀膜质量、生产效益的主要因素和解决途径。重点论述了提高镀膜速度和膜层附着力的科学依据,解决了当前金属卷材连续卷绕镀膜生产线中出现的镀膜效率低,均匀性差,光谱L、a、b值光学性能不稳定等难题。自主研发的AEG电弧离子刻蚀辅助系统和柱状阴极电弧离子蒸发技术与中频磁控溅射镀膜技术综合应用,使镀膜沉积速率提高1.3~2倍,整卷镀膜L值色差波动不大于±1.0,a值色差波动不大于±1.5,b值色差波动不大于±1.8。
This paper introduces in detail the working principle,structure composition,technical characteristics and main innovative design points for a large-scale metal strip surface modification continuous roll to roll coating production line.It analyzes and points out the main factors and solutions that affect the coating quality and production efficiency of the metal strip with large diameter and width.It focuses on the scientific basis of improving the coating speed and film adhesion,and solves the problems of low coating efficiency,poor uniformity,unstable optical properties of spectrum L,a,b value and so on in the current metal strip continuous winding coating production line.The comprehensive application of the independently developed AEG arc ion etching auxiliary system,cylindrical cathode arc ion evaporation technology and medium frequency magnetron sputtering technology help to increase the deposition rate by 1.3~2 times.The color difference fluctuation of L value,a value and b value of the whole roll coating is not more than±1.0,±1.5 and±1.8,respectively.
作者
罗军文
LUO Jun-wen(Guangdong HuiCheng Vacuum Technology Co.,Ltd.,Dongguan 511700,China)
出处
《真空》
CAS
2021年第3期35-38,共4页
Vacuum
关键词
金属卷材
离子刻蚀
柱状长弧
中频溅射
连续线
metal strip
ion etching
cylinder long arc
medium frequency sputtering
RTR continuous line