微波表面波对管内壁沉积DLC薄膜的均匀性的研究

Study on DLC Coating Uniformity in the Tube Inner Wall Through Microwave Surface Wave Plasma Deposition

本文主要是开展对管状件内壁(如碳钢、聚酯PET瓶、塑料针筒等)采用微波表面波等离子体沉积薄膜的均匀性的研究。论文从沉积薄膜的工艺参数到微波耦合天线的设计对所沉积的纳米DLC薄膜均匀性的影响因素方面进行了探索,通过测量沿天线方向不同位置薄膜的沉积速率得到:影响微波等离子体沉积薄膜均匀性的因素主要是表面波强度的大小,Penning放电只能改善区域性薄膜沉积,不能在整个天线范围增强放电、不能制备均匀的纳米薄膜。

This paper reports the study on the uniformity of DLC coating deposited in the inner wall of tubal samples(such as carbon steel,PET bottle,plastic syringe)by microwave surface wave plasma.The main factors affecting the uniformity of as-deposited nanoscale coatings along the antenna direction were explored.By measuring the deposition rates of the coatings at different positions,it can be concluded that the generation and strength of surface wave dominate the uniformity of the DLC coating in the inner wall of tubes.Penning discharge can only affect the discharge characteristics regionally by the enhancement of the discharge,not the discharge model.Therefore,it is impossible to improve the uniformity of the coatings in the tube in whole antenna range.