真空计在线校准系统的研制

Research of Online Calibration System for Vacuum Gauge

为了解决真空计在线校准的问题,研制出一种真空计在线校准系统。真空计在线校准系统通过优化设计、材料及工艺处理已解决宽量程校准的问题。通过对在线校准技术的研究,采用比较法校准方法,以三台高精度的薄膜真空计和一台高精度电离真空计作为参考标准,解决了校准条件与使用条件基本一致性问题,可以减小量值传递过程产生的不确定度,保证测量的准确性和可靠性。真空计在线校准系统可实现(105~10-5)Pa范围内的真空计的在线计量,相对扩展不确定度不大于13%。

In order to solve the problem for online calibration of vacuum gauge,an online calibration system of vacuum gauge is developed.The online calibration system of vacuum gauge solves the problem of wide range calibration by optimizing design,material and process treatment.Through the research of online calibration technology,the comparison method is adopted.Three high-precision baratrons and one high-precision ionization gauge are used as reference standard to solve the problem that the calibration conditions are basically the same as the application conditions,which can reduce the uncertainty in the process of value transfer and ensure the accuracy and reliability of measurement.The online calibration system can realize the online measurement of vacuum gauge in the range of 105~10-5Pa.The relative expanded uncertainty is not more than 13%.