利用漏率间接测量密封件真空度方法的研究

Study on the Method of Indirectly Measuring the Vacuum Degree of Seals by Using Leakage Rate

本文提出利用漏率间接测量真空度的方法,解决密封件腔内真空度的测量问题。在此基础上开展相关实验,探究该方法在实际应用中的可行性以及相关适用条件等。实验以连接不同尺寸规格金属毛细管的模拟件为研究对象,利用动态流量法测量模拟件的漏率,进而间接获得模拟件的腔内真空度。实验结果表明,利用漏率间接测得的模拟件真空度与利用皮拉尼规原位测得的模拟件真空度的偏差在15%左右,偏差较小。同时实验中还发现该方法存在包括测量范围、反应时间等限制性适用条件,并在理论上做了合理的解释,进而完备了该方法,并为实际应用奠定了基础。

This paper proposes a method to indirectly measure the vacuum degree using the leak rate to solve the problem of measuring the vacuum degree in the seal cavity.On this basis,relevant experiments are carried out to explore the feasibility of the method in practical applications and relevant applicable conditions.The experiment takes a simulation part connected with metal capillaries of different sizes as the research object,and uses the dynamic flow method to measure the leakage rate of the simulation part,thereby indirectly obtaining the vacuum degree in the cavity of the simulation part.The experimental results show that the difference between the vacuum of the simulated part measured indirectly using the leak rate and the vacuum of the simulated part measured in situ using the Pirani gauge is about 15%,and the deviation is small.At the same time,the experiment also indicated that the method has restrictive applicable conditions including measurement range,reaction time and so on,and made a reasonable explanation in theory,and then perfected the method and laid the foundation for practical application.