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蝶翼式振动加速度传感器设计与制造 被引量:3

Design and manufacture of butterfly vibration acceleration sensor
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摘要 针对故障诊断与安全监测的应用需求,设计了一种大量程、体积小、高谐振频率的蝶翼式振动加速度传感器。通过COMSOL有限元分析(FEA)对敏感结构进行了分析与优化设计。采用了基于绝缘体上硅(SOI)圆片的敏感结构制造工艺完成了敏感结构的加工,将敏感结构与信号检测电路进行了集成,并与传感器结构件进行了封装,完成了蝶翼式加速度传感器的制造。最终,对蝶翼式振动加速度传感器的灵敏度、灵敏度误差、谐振频率等主要性能指标进行了测试。 A butterfly vibration acceleration sensor with wide-range, small volume and high resonance frequency, aiming at the application requirements of fault diagnosis and safety monitoring.The specific dimensions of the sensitive structure are simulated and optimized based on the finite element analysis(FEA) software of COMSOL.The accelerometer sensitive structure is fabricated by the SOI wafer.Then the sensitive structure and the signal detecting circuit are integrated and encapsulated by the sensor package part.Finally, the main performance of the sensor are characterized including sensitivity, sensitivity error, resonance frequency, etc.
作者 李凯 单恒 蒲金飞 陈伟琪 吴学忠 侯占强 LI Kai;SHAN Heng;PU Jinfei;CHEN Weiqi;WU Xuezhong;HOU Zhanqiang(College of Intelligent Science,National University of Defense Technology,Changsha 410073,China;TangZhi Science and Technology Hunan Development Co Ltd,Changsha 410007,China)
出处 《传感器与微系统》 CSCD 北大核心 2021年第6期60-62,共3页 Transducer and Microsystem Technologies
基金 国家自然科学基金资助项目(51505490)。
关键词 振动传感器 加速度 蝶翼式 微机械加工 集成封装 vibration sensor acceleration butterfly micro-machining integration and encapsulation
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  • 1谭思明.基于专利地图技术的中、美微流控专利竞争情报研究[J].情报杂志,2005,24(5):33-35. 被引量:9
  • 2张文明,孟光.MEMS可靠性与失效分析[J].机械强度,2005,27(6):855-859. 被引量:22
  • 3车录锋,卢云,徐志农.铰链式高冲击微加速度传感器封装的有限元模拟[J].光学精密工程,2007,15(2):199-205. 被引量:13
  • 4Stewart R. MEMS low cost inertial grade accelerometers and gyros using a common, bulk micromachining process. Proceedings of the AIAA Conference on Guidance. Navigation and Control, 1999-08 : 736-742.
  • 5Wisniowski H. Analog devices introduees world' s first integrated gyroscope. 2002-10-01 http:// www. analog, com/ technology/ meres/gyroscopes.
  • 6Xue Songjiang, Seeger J I, Kraft M, etal. A monolithic surface micromachined Z-axis gyroscope with digital output. VLSI Circuits, Digest of Technical Papers 2000 Symposium on, 2000(6) :16-19.
  • 7Matthews A, Paterson R, Goldman A, Abbink H, Stewart R. A new paradigm in guidance, navigation, and control systems based on bulk micromachined inertial sensors. Proceedings of the AIAA Conference on Guidance, Navigation and Control, 2000-08 : 1-12.
  • 8王勇.电子产品的系统集成与内装测试应用研究[J].国防技术基础,2010,(8):36-37.
  • 9EDN China.LPS001WP:意法半导体推出MEMS传感器适用于便携设备、汽车和工业[EB/0L].(2010-12-02)[2011-03-22].Http://www.cntronics.corn/public/art/artinfo/id/80008757.
  • 10Yole Development SA. MEMS technology: worlds smallest barometric pressure sensor [J], Micronews, 2009, 78: 1.

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