摘要
微定位平台是能够实现微米级别定位或调整精度的柔性微动系统。扩大运动行程、提高固有频率是微定位平台的主要研究问题,通过三个放大机构相互制约,相互影响,设计一种大行程、高刚度、结构紧凑的平面三自由度微定位平台。平台的驱动方式采用压电驱动,压电陶瓷采用并联的方式。介绍了该平台的建模、计算和仿真分析。设计的平台的X和Y方向运动范围为185.8μm。载物台为边长32 mm的等边三角形,有效提高了结构的刚度和稳定性。
Micro positioning platform is a flexible micro positioning system which can realize micro positioning or adjustment precision.A planar three degree of freedom micro-positioning platform with large travel, high stiffness and compact structure is designed through the mutual restriction and interaction of three amplification mechanisms.The driving mode of the platform is piezoelectric, and the piezoelectric ceramic is parallel.Modeling, calculation and simulation analysis of the platform are introduced.The motion range of the platform in X and Y directions is 185.8 μm.The platform is an equilateral triangle with 32 mm side length, which improves the rigidity and stability of the structure.
作者
韩慧
刘丽
HAN Hui;LIU Li(Hubei University of Arts and Science,Xiangyang 441053,China;University of Electronic Science and Technology of China,Chengdu 610054,China)
出处
《传感器与微系统》
CSCD
北大核心
2021年第6期73-75,共3页
Transducer and Microsystem Technologies
基金
2020年襄阳市“汉江智库”一般项目(HJZKYBKT2020024)
2018年襄阳市“汉江智库”青年学者研究项目(XYQNXZ2018007)。
关键词
微定位平台
大行程
并联
仿真分析
micro-positioning platform
large stroke
parallel connection
simulation analysis
