氧化钛电阻存储薄膜的电学性能研究

The Study of Electical Property of TiO_(2) Resistive Memory Thin Films

采用溶胶凝胶法制备氧化钛薄膜,测试其电学性能,测试结果表明,氧化钛薄膜具有电阻反转特性,但重复性不稳定。使用原子力显微镜在微观状态下观察可知,随着施加电压的增大,表面析出物的量会增加,其影响薄膜的电学性能测试,会导致薄膜测试处的顶电极破坏使整个样品击穿;但表面析出物为何种物质,有待进一步研究。

In this paper,the electrical properties of TiO2 thin films prepared by sol-gel method are tested.The results show that TiO_(2) thin films have resistance inversion characteristics,but the repeatability is unstable.With the increase of applied voltage,the amount of precipitates on the surface will increase,which will affect the measurement of the electrical properties of the film and lead to the breakdown of the top electrode of the film But what the surface precipitates are remains to be further studied.