基于微流控芯片的五腔室压电蠕动微泵的设计

Design of Five-chamber Piezoelectric Peristaltic Micropump Integrated on a Microfluidic Chip

微泵作为微系统领域的重要组成部分,因其具有操纵小体积液体的能力被广泛应用。蠕动微泵作为机械式微泵的一个子类,通常包含3个泵送流体的微腔室。三腔室微泵反向截止压强较小会导致液体回流的问题,这限制了分离式蠕动微泵的广泛应用。该文设计制作了一种由PDMS(聚二甲基硅氧烷)和载玻片组成的具有5个独立驱动单元的压电蠕动微泵,并对比分析了五腔室微泵和三腔室微泵在流体运输性能上的区别。实验结果表明,五腔室微泵相较于三腔室微泵的反向截止压强最高可提高2.4倍。在驱动电压120 V,频率100 Hz时反向截止压强可达12 kPa,流量可达15.85μL/min。该研究结果对多腔室压电蠕动微泵的发展具有一定的指导意义,有助于蠕动微泵芯片结构的设计及优化。

As the essential components of microsystems,micropumps are widely used due to their precise controll in flowrate.Peristaltic micropump,as a subclass of mechanical micropumps,usually contains three microchambers for transporting fluid.However,due to the small backpressure of three chamber micropumps,the problem of liquid reflux greatly limits the wide application of separate peristaltic micropumps.Therefore,a piezoelectric peristaltic micropump composed of PDMS and glass slides with five independent driving units is designed and manufactured in this paper.This paper compares the transportation performance of the five-chamber micropump and the three-chamber micropump under the same experimental conditions.The result indicates that compared with the three-chamber micropump,the backpressure of the five-chamber micropump can be increased by 2.4 times.When the voltage is 120 V,the frequency is 100 Hz and the backpressure is up to 12 kPa,the flow rate is up to 15.85μL/min.The results have a certain guiding significance for the development of multi-chamber piezoelectric peristaltic micropumps and contribute to the design and optimization of microfluidic chip structure.