摘要
碱金属蒸气腔室广泛用于原子钟和原级温度计等重要领域,与其相适配的微型加热器对碱金属蒸气腔室的应用有着重要的影响。设计了一种可用于双腔体蒸气腔室的微型加热器,并利用仿真估算了微加热器的加热效果。基于微电子机械系统(MEMS)薄膜制备工艺,利用溅射沉积了氧化铟锡(ITO)薄膜与Cr/Au薄膜,利用剥离工艺将薄膜图形化后制备了微加热器的结构。经过光学、热学和电学测试可知,该微加热器在700~900 nm波长内能够保持80%以上的透光率;在外接电压不低于4 V时,能为碱金属蒸气腔室提供100℃以上的工作温度;在5~10 min的预热时间后,该微加热器的加热范围可以覆盖双腔体蒸气腔室75%以上的区域。该微加热器很好地满足了多腔体蒸气腔室的使用需求。
The alkali metal vapor cells are widely used in important fields,such as atomic clocks,primary thermometers and so on.The micro heater compatible with the cells has an important influence on the application of alkali metal vapor cells.A micro heater used in a double-cavity vapor cell was designed,and the heating effect of the micro heater was estimated by simulation.Based on the micro-electromechanical system(MEMS)film microfabrication process,the indium tin oxide(ITO)film and Cr/Au film were deposited by sputtering and patterned by the lift-off process,and then the structure of the micro heater was fabricated.The optical,thermal and electrical tests were completed.The results show that the micro heater can maintain a light transmittance of more than 80%in the wavelength range of 700-900 nm;when the external voltage is not lower than 4 V,it can provide a working temperature of above 100℃for the alkali metal vapor cell;after a preheating time of 5-10 min,the heating range of the micro heater can cover more than 75%of the double-cavity vapor cell.The micro heater well satisfies the requirements of the multi-cavity vapor cell.
作者
仲逸飞
林祖德
刘景全
Zhong Yifei;Lin Zude;Liu Jingquan(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai 200240,China;School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第6期509-514,共6页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61728402)。
