CMP干燥模组控制软件设计

Design of Control Software for CMP Equipment Drying Module

介绍了旋转干燥和异丙醇加热雾化干燥的工作原理,深入分析了控制软件的需求,利用面向对象的设计方法,完成了系统架构的设计,并对干燥加工、异丙醇补液、参数监控3个关键功能模块进行了设计,目前该软件已在设备端应用中达到了理想的工艺性能。

This paper introduces the working principles of rotary drying and IPA heating and atomization drying,deeply analyzes the requirements of the drying module control software,uses the object-oriented design method to complete the system architecture design,and introduces a detailed design of the key function modules,including dry processing control,IPA replenishment and parameters monitoring.At present,the software has reached the ideal process performance in the application of equipment。