摘要
改进了分子束外延设备样品加热平台的加热和测温方式,在原有热辐射加热和红外测温的基础上,增加直流电流加热并采用比例积分微分(PID)精密控温装置对样品加热台进行测温和控温.改进后,原有设备所能制备的研究样品范围更广,并且还增加了围绕设备所展开的科研方向,扩充了设备的使用范围.
In order to improve the heating and temperature measurement method of the sample heating stage made by the molecular beam epitaxy(MBE)equipment produced by SPECS in Germany,the direct current(DC)heating was added to the original thermal radiation heating and infrared temperature measurement.The proportional integral derivative(PID)precision temperature control device is used to measure and control the temperature of the sample heating platform.After the improvement,the proportional integral derivative(PID)precision temperature control device is used to measure and control the temperature of the sample heating platform.And the range of research samples that can be prepared by the original equipment is wider,the research direction around the equipment is increased,the scope of use of the equipment is expanded.
作者
马智锟
MA Zhi-kun(School of Physical Science and Technology,Lanzhou University,Lanzhou 730000,China)
出处
《分析测试技术与仪器》
CAS
2021年第2期100-104,共5页
Analysis and Testing Technology and Instruments
基金
国家自然科学基金(12074157)。
关键词
分子束外延
样品台加热
测温系统
MBE
sample stage heating
temperature measurement system
