薄膜材料X射线衍射物相分析与内应力测定

PHASE IDENTIFICATION AND INTERNAL STRESS DETERMINATION IN THIN FILMS BY X-RAY DIFFRACTION

基于不对称布拉格反射理论 ,介绍了薄膜材料二维X射线衍射分析方法 ,并对铝合金表面的TiN薄膜进行了分层掠射分析 ,证实了该分析方法的可行性。结合掠射、侧倾、内标及交相关函数定峰等技术 ,改进了常规X射线应力测量方法 ,测量了上述薄膜中的内应力 ,表明可显著提高内应力测量精度。

Based on the non symmetrical diffraction theory, a two dimensional X ray diffraction technique is presented in the present paper. The depth profile of the phases existing in a TiN film deposited on Al alloy substrate was analysed by using the glancing method, indicating the feasibility of the proposed technique. The conventional X ray diffraction method is improved in combination with glance incidence, side inclination, internal standard and cross correlation function. It has been employed to the determination of internal stress in thin films and the results show an enhanced measuring accuracy.