一种等离子体诊断的开放式谐振器研究

Research on an Open Resonator for Plasma Diagnosis

本文提出了一种可用于等离子体诊断的开放式谐振器设计。谐振器由高Q型谐振腔和点聚焦天线组成,并通过强耦合孔将两者结合。高Q型谐振腔的部分能量由强耦合孔辐射至天线,经点聚焦天线将辐射能量汇聚于等离子体层。由等离子体电子密度变化引起天线反射系数的变化,该变化与高Q型谐振腔互作用后引起谐振频率和Q值的变化。经实际测试,随着等离子体电子密度的升高,谐振腔的谐振频率和Q值呈现上升趋势,可用于实现等离子体电子密度的非接触性探测。

This paper presents an open resonator design for plasma diagnosis.The resonator consists of a high-Q resonator and a point focused antenna,which are combined by a strong coupling hole.Part of the energy of the high-Q resonator radiates from the strong coupling hole to the antenna,and the radiation energy is concentrated in the plasma layer through the point focusing antenna.The change in the plasma electron density causes the change in the reflection coefficient of the antenna,which interacts with the high-Q resonant cavity to cause changes in the resonant frequency and Q value.The experimental results show that with the increase of plasma electron density,the resonant frequency and Q value of the resonator show an upward trend,so it can be used to realize non-contact detection of plasma electron density.