基于液体摆的双轴电容式倾角传感器

Dual-Axis Capacitive Inclination Sensor Based on Liquid Pendulum

为了克服现有倾角测量传感器制作工艺复杂、价格昂贵和操作困难的缺点,根据液体在电极间流动时电容的变化,设计了一种液体摆双轴电容式倾角传感器,推导了传感器的偏转角度与电容值之间的关系模型,并对传感器在单轴和全方位偏转角度下的响应进行分析。测试结果表明,此传感器在内轴和外轴上的灵敏度分别为0.021 5 pF/°和0.034 7 pF/°,测量精度达到了0.3°和0.4°,双轴测量范围为±70°,响应时间小于0.5 s。其在室温下性能稳定、受振动干扰较小,能够精确检测机械臂的偏转状态。由于采用聚合物材料一体成型,该传感器成本低、制作方便,具有广阔的应用前景。

To overcome disadvantages of the existing inclination measurement sensor,such as complicated manufacturing process,high price and difficult operation,a liquid pendulum dual-axis capacitive inclination sensor was designed according to the change of the capacitance when the liquid flows between the electrodes,and the relation model of the deflection angle and capacitance value for the sensor was derived.The response of the sensor under single-axis and omni-directional deflection angle was analyzed.The test results show that the sensitivities of the sensor on the inner axis and outer axis are 0.021 5 pF/°and 0.034 7 pF/°respectively,the measurement accuracy reaches 0.3°and 0.4°respectively,the dual-axis measurement range is±70°,and the response time is less than 0.5 s.The sensor has stable performance and little vibration interference at room temperature,and can accurately detect the deflection state of the robotic arm.Due to the integrated molding of polymer materials,the sensor is of low cost and easy fabrication,and has broad application prospects.