W波段折叠波导行波管用硼掺杂金刚石衰减器的设计与性能研究

Design and Study of Boron-Doped CVD Diamond Attenuator for W-Band Folded Waveguide Traveling Wave Tube

利用微波等离子体化学气相沉积(MPCVD)设备制备了硼掺杂CVD金刚石,采用三维电磁仿真软件和飞秒激光加工系统优化设计并研制出用于W波段折叠波导行波管的硼掺杂CVD金刚石衰减器,采用矢量网络分析仪分别测试了硼掺杂CVD金刚石的介电性能和衰减器的驻波系数和传输系数。结果表明硼掺杂CVD金刚石在W波段介电常数在7.49~8.43之间,损耗角正切≥0.26;硼掺杂CVD金刚石衰减器在85~110 GHz范围内驻波比小于1.10,S 21<-50 dB。

Boron-doped diamond film was prepared by microwave plasma chemical vapor deposition(MPCVD).The Boron-doped CVD diamond attenuator which was used in W band folded waveguide traveling wave tube was designed and prepared by the 3D simulation software and the femtosecond laser.The dielectric property of the boron-doped diamond film and the match characteristic and the absorbability of the boron-doped diamond attenuator were investigated by vector network analyzer.The result show that the dielectric constant was between 7.49 and 8.43,and the loss tangent was more than 0.26 in W band;The voltage standing wave ration(VSWR)and S 21 of boron doped CVD diamond attenuator were less than 1.10 and below-50 dB in the range of 85-110 GHz.