Fe-Co薄膜与Al_(2)O_(3)基体相互扩散和相互作用相关的微观结构演变

Interdiffusion and Interaction Associated Microstructure Evolution Between Fe-Co Thin Film and Al_(2)O_(3) Substrate

利用先进分析透射电子显微镜,检测并系统地研究了磁控溅射Fe-Co薄膜与Al_(2)O_(3)基体之间的相互扩散。结果表明,扩散会形成尖晶石相Fe Al_(2)O_(4),并导致界面层的形成。微观结构表征表明,在界面附近的Fe-Co薄膜中形成了与相互扩散相关的非公度结构。本研究不仅检测到Fe-Co薄膜与蓝宝石基体之间的相互扩散和伴随的新相形成,而且揭示了界面区域相应的微观结构演变,这些结果可能对薄膜的磁学性质有很大的影响。

By advanced analytical transmission electron microscope,an unexpected interdiffusion between magnetron sputtered FeCo thin film and Al_(2)O_(3) substrate was detected and systematically investigated in this study.Results show that a new phase of spinel FeAl_(2)O_(4) forms,leading to the formation of interfacial layer.Detailed micro structure characterization reveals the interdiffusion associated with incommensurate structure formation near the interface in the Fe-Co thin film.The interdiffusion and accompanied new phase formation between the Fe-Co thin film and sapphire substrate are detected,and the associated microstructure evolution at the interfacial region is discussed,which may considerably influence the thin film magnetic properties.