感应耦合等离子体中和枪的电子引出特性研究

The characteristics of electron extraction of inductively coupled plasma neutralization gun

给出了一种感应耦合等离子体源的设计,用于等离子体中和枪装置。通过实验方法研究等离子体源的电子引出特性,并结合理论分析了等离子体密度随射频功率的变化关系。研究结果表明等离子体源的电子引出特性与放电腔内气压有关联性,E?H模式转换中电子密度的变化与负载的电感值相关。研究成果对等离子体中和枪的发展有重要的参考价值。

A design of inductively coupled plasma source using in plasma neutralization gun is present. The electron extraction characteristics of the plasma source were studied experimentally, and the relationship between plasma density and RF power was analyzed. The results show that the electron extraction characteristics of the plasma source are related to the gas pressure in the discharge chamber, and the change of electron density during E-H mode conversion is related to the inductance of the load.