折线型IDT的SAW微力传感器设计研究

Design and research of SAW micro-force sensor based on polyline IDT

声表面波(SAW)微力传感器易于集成和小型化,无源无线的工作方式,具有极大的应用潜力。将其应用于物体间微间隙压力检测有望实现高灵敏、低功耗的监测水平。针对复杂环境中存在的测量灵敏度问题,设计了一种具有折线形状的叉指换能器(IDT)的SAW微力传感器。采用有限元分析方法(FEM)对其进行了仿真分析和结构参数设计。理论分析与实验表明,设计的传感器质量灵敏度可达284.16 kg/m^(2),高于直线形IDT的SAW传感器185.97 kg/m^(2),验证了此结构能够有效提高器件的质量灵敏度,及在微间隙环境下压力监测的可行性。

Surface acoustic wave(SAW)micro-force sensor has the characteristics of easy integration and miniaturization,passive wireless working mode,and has great application potential.Applying it to measure the micro-gap pressure between objects is expected to achieve a high-sensitivity,low-power monitoring level.Aiming at the problem of measurement sensitivity in complex environments,SAW micro-force sensor with a broken-line interdigital transducer(IDT)is designed.The finite element analysis method(FEM)is used to carry out simulation analysis and structural parameter design.Theoretical analysis and experiments show that the mass sensitivity of the designed sensor can reach 284.16 kg/m^(2),which is higher than the linear IDT SAW sensor with the mass sensitivity of 185.97 kg/m^(2).The results verify that IDT structure can effectively improve the mass sensitivity of the device and the feasibility of monitoring the pressure in a micro-gap environment.