摘要
基于迈克尔逊干涉原理,利用干涉成像原理和图像处理技术,提出了利用干涉条纹半径变化情况来获取干涉条纹位移信息的方法。该方法以面阵CCD相机采集的图像为处理对象,采用去噪、顶帽变换、二值化、形态学处理等预处理操作,再利用连通域特征识别得到图像中心亮干涉条纹的半径。通过半径的变化趋势与幅度,实现位移信息提取。实验表明,所提方法突破了干涉条纹计数时位移检测最高分辨率为λ/2的限制,利用了每帧干涉图像所提供的变化信息,实现位移检测分辨率λ/4。
Based on Michelson interference, propose a micro-displacement information extraction method using imaging principle and image processing. The processing object of the method is equal inclination fringes collected by planar-array CCD camera. The image preprocessing for each frame includes denoising, top-hat transformation, binarization, morphology operations. Then radius of the bright interference fringe at the center of the image is obtained by feature recognition. By comparing the change trend and amplitude of the radius of frame sequence, the method realizes displacement information extraction. Experiments show that detection resolution of the method is λ/4 by making use of the information provided by every frame, which is superior to the maximum resolution of λ/2 of the detection by interference fringe counting.
作者
李忠明
唐延甫
李俊霖
杨永强
李洪雨
Li Zhongming;Tang Yanfu;Li Junlin;Yang Yongqiang;Li Hongyu(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science,Changchun 130033,China;University of Chinese Academy of Science,Beijing 100049,China)
出处
《电子测量技术》
北大核心
2021年第5期51-54,共4页
Electronic Measurement Technology
基金
国家自然科学基金(51505076)项目资助。
关键词
迈克尔逊干涉
信息提取
图像处理
特征识别
Michelson interference
information extraction
image preprocessing
feature recognition
