摘要
该文研究了Pb(In_(1/2)Nb_(1/2))O_(3)-Pb(Mg_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PIN-PMN-PT)基片上声表面波(SAW)的传播特性。利用COMSOL软件建立SAW谐振器三维模型并进行模拟仿真。通过优化谐振器参数,设计了一种具有超大机电耦合系数(K^(2))的谐振器结构。结果表明,当欧拉角为(0°,-70°,0°)时,SH0模态的K^(2)可优化到约85%,且通带内无寄生响应。
The propagation characteristics of surface acoustic wave(SAW)on Pb(In_(1/2)Nb_(1/2))O_(3)-Pb(Mg_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PIN-PMN-PT)substrates are studied.The three-dimensional model of SAW resonator is established and simulated by COMSOL software.By optimizing the resonator parameters,a resonator structure with ultra-large electromechanical(K^(2))is designed.The results show that when the Euler angle is(0°,-70°,0°),the K^(2) of SH0 mode can be optimized to about 85%,and there is no spurious resonance in the passband.
作者
张小德
王华磊
李儒章
钟慧
石玉
ZHANG Xiaode;WANG Hualei;LI Ruzhang;ZHONG Hui;SHI Yu(School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 610054,China;Key Laboratory of Analog Integrated Circuit(National Level),Chongqing 400060,China)
出处
《压电与声光》
CAS
北大核心
2021年第3期328-330,335,共4页
Piezoelectrics & Acoustooptics
基金
重庆市项目博士后基金资助项目(xm2017042)
四川省科技计划重点研发基金资助项目(2020YFG0041)
四川省科技计划重点研发基金资助项目(2020YFG0042)。
