柔性电涡流式触觉传感器性能仿真与分析

Performance Simulation and Analysis of Flexible Eddy Current Tactile Sensor

为实现机器人手指柔性传感,满足高灵敏度、高可靠性、尺寸微小化等要求,文中提出一种基于电涡流原理的柔性触觉传感器,建立了传感器二维对称仿真模型,通过有限元分析研究激励频率、线圈与金属板间距和单维载荷对传感器灵敏度和分辨率的影响。结果表明:初始激励频率为3 MHz时,传感器的工作性能最好;电涡流传感器的电压、电阻和电抗随线圈与金属板间距的减小而呈下降趋势,间距越小灵敏度越高;施加单维载荷时,传感器对切向载荷的分辨率明显高于法向载荷。研究结果为柔性电涡流触觉传感器的设计优化提供参考。

In order to realize the flexible finger sensing device of robot and meet the requirements of high sensitivity,reliability and small size,a flexible tactile sensor based on eddy current principle was proposed in this paper.A two-dimensional symmetric simulation model of the sensor was established.The effects of excitation frequency,coil-metal plate spacing and one-dimensional load on the sensitivity and resolution of the sensor were studied by finite element analysis.The results show that the sensor has the best working performance when the initial excitation frequency is 3 MHz.The voltage,resistance and reactance of eddy current sensor decrease with the decrease of the distance between coil and metal plate,and the smaller the distance is,the higher the sensitivity is.When one-dimensional load is applied,the resolution of the sensor for tangential load is obviously higher than that for normal load.The research results provide certain reference value and basis for the design optimization of flexible eddy current tactile sensor.