磷锗锌晶体脆塑转变临界切削深度的研究

Study on Critical Cutting Depth of Brittle-plastic Transition of ZnGeP_(2) Crystal

为实现磷锗锌(ZnGeP_( 2))晶体超精密切削,提高表面加工质量,获得纳米级的超光滑表面,基于纳米压痕实验计算出磷锗锌晶体表面脆塑转变临界深度。在此深度内切削材料产生脆塑转变,并以塑性方式去除。在此基础上,采用单点金刚石飞切机床DFC600A开展磷锗锌晶体超精密切削。通过控制切削深度低于磷锗锌晶体脆塑转变临界深度,使材料表面仅发生塑性变形,实现了晶体表面纳米级光滑表面加工,表面粗糙度达1.01 nm,达到了对磷锗锌晶体表面的加工要求,验证了方法的有效性。

In order to realize ultra-precision cutting of ZnGeP_( 2) crystals,improve the surface processing quality and obtain a nano-scale smooth surface,the critical depth by brittle-ductile transformation on the surface of ZnGeP_( 2) crystals was calculated according to the nanoindentation experiments.Within this depth,the cutting material occurs a brittle-ductile transformation and is removed in a ductile manner.On this basis,the ultra-precision cutting of ZnGeP_( 2) crystals was carried out with a single-point diamond fly cutting machine DFC600A.By controlling the cutting depth to be lower than the critical depth of the brittle-ductile transformation of the ZnGeP_( 2) crystals,make the surface of the material only plastically deformed,the nano-scale smooth surface processing of the crystal surface was achieved,and the surface roughness reached 1.01 nm,met the requirements for the surface of the ZnGeP_( 2) crystal,which verified the effectiveness of the method.