摘要
为实现磷锗锌(ZnGeP_( 2))晶体超精密切削,提高表面加工质量,获得纳米级的超光滑表面,基于纳米压痕实验计算出磷锗锌晶体表面脆塑转变临界深度。在此深度内切削材料产生脆塑转变,并以塑性方式去除。在此基础上,采用单点金刚石飞切机床DFC600A开展磷锗锌晶体超精密切削。通过控制切削深度低于磷锗锌晶体脆塑转变临界深度,使材料表面仅发生塑性变形,实现了晶体表面纳米级光滑表面加工,表面粗糙度达1.01 nm,达到了对磷锗锌晶体表面的加工要求,验证了方法的有效性。
In order to realize ultra-precision cutting of ZnGeP_( 2) crystals,improve the surface processing quality and obtain a nano-scale smooth surface,the critical depth by brittle-ductile transformation on the surface of ZnGeP_( 2) crystals was calculated according to the nanoindentation experiments.Within this depth,the cutting material occurs a brittle-ductile transformation and is removed in a ductile manner.On this basis,the ultra-precision cutting of ZnGeP_( 2) crystals was carried out with a single-point diamond fly cutting machine DFC600A.By controlling the cutting depth to be lower than the critical depth of the brittle-ductile transformation of the ZnGeP_( 2) crystals,make the surface of the material only plastically deformed,the nano-scale smooth surface processing of the crystal surface was achieved,and the surface roughness reached 1.01 nm,met the requirements for the surface of the ZnGeP_( 2) crystal,which verified the effectiveness of the method.
作者
曹中浩
阳红
CAO Zhonghao;YANG Hong(Institute of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang,621900,Sichuan,China)
出处
《机械科学与技术》
CSCD
北大核心
2021年第6期908-911,共4页
Mechanical Science and Technology for Aerospace Engineering
基金
国家自然科学基金项目(51305413)
高档数控机床国家科技重大专项项目(2017ZX04022001-201-003)
中物院超精密加工技术重点实验室基金项目(K1128)。
关键词
磷锗锌晶体
纳米压痕实验
临界深度
超精密切削
ZnGeP_(2)crystals
nanoindentation experiment
critical depth
ultra-precision cutting