电子气体氨气分析系统的研究

Study on Electronic Gas Ammonia Analysis System

氨气是半导体工业中的重要电子气体,常有电子级、光电子级、7N光电子级三个级别,其作为一种理想的氮源在半导体和化合物半导体器件制造中广泛应用。随着科技的发展进步,电子产品、新型节能照明器件、清洁能源等的需求日益增大,对于氨气的纯度要求也越来越高。氨中的任何杂质组分的含量稍微超出其行业规定的最低含量,都将给产品的性能带来致命的影响,从而影响产品的良品率和成品率。而氨中的杂质组分氢气、氧气、氩气、氮气、甲烷、一氧化碳、二氧化碳的含量均为10^(-9)级别,需要用气相色谱仪精确的检测其中的杂质组分,为此,设计出一种用于氨气分析检测的气路流程系统,可以高效的分离氨气中的各种杂质组分,定性定量准确,分析周期短。

Ammonia is an important electron gas in semiconductor industry,which has three levels:electron,photoelectron and 7N photoelectron.As an ideal nitrogen source,ammonia is widely used in semiconductor and compound semiconductor device fabrication.With the development of science and technology,electronic products,new energy-saving lighting devices,clean energy,such as increasing demand,the purity requirement of ammonia gas is getting higher and higher.The content of any impurity component in ammonia slightly exceeds the minimum content stipulated by the industry,will bring the fatal influence to the product performance,thus affects the product yield and the finished product rate.However,the impurity components in ammonia,such as hydrogen,oxygen,argon,nitrogen,methane,carbon monoxide and carbon dioxide,are all in 10^(-9) level,a gas flow system for ammonia analysis and detection is designed,which can separate all kinds of impurities in ammonia with high efficiency,accurate qualitative and quantitative,short analysis period.