X射线光电子能谱复杂谱图的非线性最小二乘法分析案例

Examples of X-ray Photoelectron Spectroscopy Complex Spectrum Dealt by Nonlinear Least Square Fitting Analysis

X射线光电子能谱(XPS)是材料表面分析表征最常用的测试手段之一,然而由于XPS数据处理过程中往往会带入主观因素,其数据分析往往是一个难题。本文重点报道了XPS复杂数据分析的处理方法和案例,首先总结了非线性最小二乘法(NLLSF)分析XPS复杂谱图的适用范围;随后根据谱峰重叠的类型对实际测试分析过程中遇到的复杂数据进行了汇总、分析和归类。数据分析结果表明NLLSF方法可轻松快速扣除其他谱峰的干扰,获得了更为可靠的样品表面分析结果。在找到合适参考谱图的前提下,NLLSF方法为XPS复杂数据的准确分析提供了更多可能,在XPS的定性定量分析研究领域具有十分广阔的应用前景。

X-ray photoelectron spectroscopy(XPS)is one of the most commonly used methods for material surface analysis.However,XPS data analysis can be a very difficult task because of the relatively strong subjectivity.This paper focuses on the application examples of nonlinear least square fitting(NLLSF)to analyze these XPS spectra.Firstly,the application range of NLLSF is summarized;then,NLLSF analysis and classification of data are carried out according to the types of spectra overlapping.The analysis results show that the NLLSF method can easily and quickly eliminate the interference of other spectra and obtain more reliable results of sample surface.NLLSF method provides more possibilities for accurate analysis of complex XPS data under the premise of finding appropriate reference spectra,which has a broad application prospect in the field of qualitative and quantitative analysis of XPS.