Loadport控制系统设计

Design of Loadport Control System

在半导体生产过程中,晶圆需要经常在洁净与超洁净环境间转换,转换过程中为保证晶圆不受微粒子附着,需要使用Loadport(晶圆装载端口)做为环境转换的输入输出端口。目前在Fab厂中Loadport已得到非常广泛的应用,但其仍需依赖进口。拥有Loadport相关技术的国家仍对我国进行技术限制,所以Loadport关键技术的研发就显得尤为重要。本文设计并实现了一种Loadport控制系统可以满足实际半导体产线应用需求。

In the process of semiconductor production,wafers need to be converted between clean and ultra clean environment.In order to ensure that wafers are not attached by particles,loadport(wafer loading port)is used as the input and output port of environment conversion.At present,loadport has been widely used in fab plant,but it still depends on import.Countries with loadport related technologies still have technical restrictions on China,so the research and development of key technologies of loadport is particularly important.In this paper,a loadport control system is designed and implemented,which can meet the application requirements of actual semiconductor production line.