纳秒级高功率准分子激光器驱动系统研制

Development of Nanosecond and High-Power Driving System for Excimer Laser

采用反激升压电路与双向半桥驱动电路级联构成双级驱动电路,研制了一种纳秒级、高功率准分子激光器驱动系统。反激升压电路工作在DCM的条件下,保证输出稳定高压。双向半桥驱动电路采用输出电压信号与理想波形查找表比较,控制高低边开关产生控制脉冲,能够输出准分子激光器的任意驱动信号。通过软件仿真,分析了反激升压电路的励磁电感、开关频率、输出功率和驱动电压等工作条件对系统损耗的影响,并获得优化结果。实验表明,最窄驱动脉冲宽度为15 ns,峰值驱动电压为1000 V,脉冲上升/下降时间约为5 ns,峰值能量转换效率为68.5%,该驱动系统在实际应用中可行。

A nanosecond high power excimer laser drive system is developed using a flyback boost circuit cascade with a bidirectional half-bridge drive circuit.The flyback boost circuit works under the condition of discontinuous current mode(DCM)to ensure stable high voltage output.The bidirectional half-bridge drive circuit uses the output voltage signal comparing with the ideal waveform search table to control the high and low edge switch to produce the control pulse,which can output the arbitrary drive signal of excimer laser.Through software simulation,the effects of excitation inductance,switching frequency,output power and driving voltage on system loss are analyzed,and the optimization results are obtained.The experiment shows that the narrowest drive pulse width is 15 ns,the peak drive voltage is 1000 V,the pulse rise/fall time is about 5 ns,the peak energy conversion efficiency is 68.5%,and the driving system is feasible in practical application.