三角形均压槽气浮轴承结构分析和仿真研究

Structural Analysis and Simulation Research of Aerostatic Bearings with Triangular Pressure Groove

为满足超精密制造装备的发展需求,提高气浮支承承载性能,设计一种狭缝进气且带有三角形均压槽复合式气浮支承结构。对该结构进行建模仿真,分析不同数量、辐射角度、厚度、半径的均压槽对气浮支承结构静态性能的影响。结果表明:均压槽半径和数量对刚度峰值大小影响显著,而不同均压槽深度和角度会使得刚度峰值出现在不同的气膜间隙厚度上;均压槽体积增大使得承载力得到提升,质量流量的损耗量增加。

In order to meet the development needs of ultra-precision manufacturing equipment and improve the bearing capability of aerostatic bearing,a composite aerostatic bearing with slit inlet and triangular pressure grooves was designed.The structure was modeled and simulated,the influence of different number,radiation angle,thickness and radius of the pressure grooves on the static performance of the aerostatic bearing structure was analyzed.The results show that the radius and numbers of the groove have a significant effect on the peak stiffness,and the change in the depth and angle of the pressure grooves can cause the stiffness peak to appear at different air film thicknesses;the volume of the pressure grooves increases,the bearing capacity and the loss of flow mass increase.