自对准超导纳米线单光子探测器

Self-Aligned Superconducting Nanowire Single Photon Detector

为实现超导纳米线单光子探测器(SNSPD)快速、稳定的封装,提出将光纤和器件光敏面快速耦合的自对准封装方式。首先通过半导体微纳米加工工艺制备了基于介质反射镜结构的SNSPD器件,再利用双面套刻和深硅刻蚀技术制备出特定的SNSPD器件形状。然后设计了以光纤套管、PCB板、陶瓷插芯等为主体的封装结构并实现了SNSPD芯片与光纤陶瓷插芯的快速对准及封装,最后在2.2 K的低温下表征了自对准SNSPD的性能。本批次器件最优的结果是在1550nm达到93.7%的探测效率。通过重复性实验验证了自对准SNSPD的稳定性。实验结果表明,在反复升降温的情况下,器件效率值波动标准差在±0.60%以内。在反复插拔光纤的情况下,波动标准差为±1.80%,最大为3.24%。说明了制备的自对准SNSPD具有良好的稳定性,该封装方式有望为未来SNSPD封装模式提供参考,并为其集成化和商业化提供前期探索可能。

For fast and stable packaging of superconducting nanowire single photon detector(SNSPD),a self-aligned packaging method is developed that directly couples the optical fiber and the photosensitive area of the device.First,the SNSPD devices based on the dielectric mirror structure are fabricated by semiconductor micro-nano processing technology.The double-sided exposure and deep silicon etching technology are used to prepare the SNSPD chips,whose size matches well with the fiber sleeves.Then the main packaging structure including optical fiber sleeve,PCB,zirconia ferrule,etc.are glued together and packaged with the SNSPD chips.Finally,the sel-aligned SNSPDs are characterized at the temperature of 2.2 K.The optimal result is 93.7%of detection efficiency at 1550 nm.The stability of the self-aligned SNSPD is verified by repeated experiments.The results show that the standard deviation of the device efficiency fluctuation is within±0.60%in the case of repeated temperature rise and fall.The standard deviation of the device eficiency fluctuationis±1.80%,and the maximum is 3.24%in the case of repeated insertion and extraction of optical fibers.Experimental results show that the self aligned SNSPD has good stability,and this packaging method is expected to provide a reference for the future SNSPD packaging mode and provide early exploration possibilities for its integration and commercialization.