金刚石表面状态控制及应用探讨

Diamond Surface State Control and Application

探讨了金刚石表面高效机械平整化控制技术,提出了高效机械平整化控制和等离子体刻蚀表面状态控制方法,从而更好地服务于机械制造工艺。

This paper discusses the control technology of diamond surface high efficient mechanical leveling,and puts forward the control methods of efficient mechanical leveling and plasma etching surface state,so as to better serve the mechanical manufacturing process.